Microtechnologies

Vaidotas Barzdėnas, Romualdas Navickas

A Laboratory Manual

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Description

The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization.

This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”.

Electronic version of the book:

DOI: https://doi.org/10.3846/1337-S

Book details

Data sheet

Year:
2012
eISBN:
978-609-457-155-8
Imprint No:
1337-S
Pages:
147 p.
Language:
English
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